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Kratos - worldwideIndustrial Machinery - semionductor & vacuum
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Magnetically Levitated TMPs 

Shimadzu high performance magnetically levitated turbomolecular pumps are wide pressure range systems suitable for the production line and the research laboratory.
Available as air cooled and water cooled versions with high flow rate, the range includes heated versions and corrosion resistant types.

 

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  • Heated versions available on request
  • 3m to 30m cables available
  • Chemically resistant versions available.
  • Gas purge options available



M=air cooled, LM= water cooled
LMC= corrosion resistant
P= for PVD applications

 

You can download full data sheets for most of these pumps from this list of links.

TMP203M/LM/LMC
TMP303M/LM/LMC
TMP403M/LM/LMC
TMP803M/LM/LMC
TMP1003M/LM/LMC
TMP1103MP/LMP/MPC/LMPC
TMP1303M/LM/LMC
TMP1503M/LM/LMC
TMP2003M/LM/LMC
TMP2203M/LM/LMC
TMP3203M/LM/LMC
TMP3403LMC
TMP4203LMC
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