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Kratos - worldwideIndustrial Machinery - semionductor & vacuum
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Turbopump Data Sheets 

Shimadzu high performance magnetically levitated turbomolecular pumps are wide pressure range systems suitable for the production line and the research laboratory.
Available as air cooled and water cooled versions with high flow rate, the range includes heated versions and corrosion resistant types.

Here is a list of links to fuller data sheets on individual pump performance, available for download in PDF form.

 

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spacerthe Maglev range
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  • Heated versions available on request
  • 3m to 30m cables available
  • Chemically resistant versions available.
  • Gas purge options available



Please note: the data sheets will open in a new browser window.

TMP203download this data sheet (116k)
TMP303download this data sheet (96k)
TMP403download this data sheet (348k)
TMP803download this data sheet (196k)
TMP1003download this data sheet (148k)
TMP1303download this data sheet (80k)
TMP2203download this data sheet (156k)
TMP2303download this data sheet (108k)
TMP3203download this data sheet (176k)
TMP3403download this data sheet (164k)
TMP4203download this data sheet (180k)
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